[IEEE 2007 Digest of papers Microprocesses and Nanotechnology - Kyoto, Japan (2007.11.5-2007.11.8)] 2007 Digest of papers Microprocesses and Nanotechnology - Realization and simulation of high aspect ratio micro/nano structures by proton beam writing
Chatzichristidi, M., Valamontes, E., Raptis, I., van Kan, J.A., Watt, F.Year:
2007
Language:
english
DOI:
10.1109/imnc.2007.4456283
File:
PDF, 823 KB
english, 2007