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[IEEE 2008 IEEE Ultrasonics Symposium (IUS) - Beijing, China (2008.11.2-2008.11.5)] 2008 IEEE Ultrasonics Symposium - Spurious vibration suppression by film thickness control for FBAR
Tanifuji, Shoichi, Aota, Yuji, Oguma, Hiroshi, Kameda, Suguru, Takagi, Tadashi, Tsubouchi, KazuoYear:
2008
Language:
english
DOI:
10.1109/ultsym.2008.0543
File:
PDF, 1.09 MB
english, 2008