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[IEEE 2008 International Interconnect Technology Conference - IITC - Burlingame, CA, USA (2008.06.1-2008.06.4)] 2008 International Interconnect Technology Conference - Realization of via interconnects based on Carbon Nanotubes
Coiffic, JC, Fayolle, M., le Poche, H., Maitrejean, S., Olivier, S.Year:
2008
DOI:
10.1109/iitc.2008.4546953
File:
PDF, 291 KB
2008