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[IEEE 2007 International Semiconductor Device Research Symposium - College Park, MD, USA (2007.12.12-2007.12.14)] 2007 International Semiconductor Device Research Symposium - Thermal and humidity stability of Ge3N4 thin layers fabricated by high-density plasma nitridation
Katsuhiro Kutsuki,, Gaku Okamoto,, Takuji Hosoi,, Akitaka Yoshigoe,, Yuden Teraoka,, Takayoshi Shimura,, Heiji Watanabe,Year:
2007
Language:
english
DOI:
10.1109/isdrs.2007.4422263
File:
PDF, 655 KB
english, 2007