Secondary electrons in rf and dc/rf capacitive discharges

Plasma Sources Science and Technology 2008 / 11 Vol. 17; Iss. 4

Secondary electrons in rf and dc/rf capacitive discharges

Kawamura, E, Lichtenberg, A J, Lieberman, M A
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Volume:
17
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/17/4/045002
Date:
November, 2008
File:
PDF, 2.75 MB
english, 2008
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