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Secondary electrons in rf and dc/rf capacitive discharges
Kawamura, E, Lichtenberg, A J, Lieberman, M AVolume:
17
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/17/4/045002
Date:
November, 2008
File:
PDF, 2.75 MB
english, 2008