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${\rm CO}_{2}$ Laser Annealing for USJ Formation in Silicon: Comparison of Simulation and Experiment
Stathopoulos, Spyridon, Florakis, Antonios, Tzortzis, Giorgos, Laspas, Theodor, Triantafyllopoulos, Andreas, Spiegel, Yohann, Torregrosa, Frank, Tsoukalas, DimitrisVolume:
61
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/ted.2014.2299311
Date:
March, 2014
File:
PDF, 1.21 MB
english, 2014