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Fabrication Process for Josephson Integrated Circuits
Greiner, J. H., Kircher, C. J., Klepner, S. P., Lahiri, S. K., Warnecke, A. J., Basavaiah, S., Yen, E. T., Baker, John M., Brosious, P. R., Huang, H.-C. W., Murakami, M., Ames, I.Volume:
24
Language:
english
Journal:
IBM Journal of Research and Development
DOI:
10.1147/rd.242.0195
Date:
March, 1980
File:
PDF, 907 KB
english, 1980