Failure analysis of a silane gas cylinder valve: A case...

Failure analysis of a silane gas cylinder valve: A case study

Deng-Jr Peng, Yo-Yu Chang, Hong-Chun Wu, Charng-Cheng Tsaur, Jenq-Renn Chen
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Volume:
15
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.engfailanal.2007.03.004
File:
PDF, 892 KB
english, 2008
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