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[IEEE 2014 IEEE 40th Photovoltaic Specialists Conference (PVSC) - Denver, CO, USA (2014.6.8-2014.6.13)] 2014 IEEE 40th Photovoltaic Specialist Conference (PVSC) - Study of intrinsic stress in hydrogenated amorphous silicon PECVD films with cyclohexasilane (CHS) as a precursor
Pokhodnya, Konstantin, Anderson, Kenneth J., Boudjouk, Philip R.Year:
2014
Language:
english
DOI:
10.1109/pvsc.2014.6925582
File:
PDF, 347 KB
english, 2014