![](/img/cover-not-exists.png)
[IEEE 2007 IEEE International Test Conference - Santa Clara, CA, USA (2007.10.21-2007.10.26)] 2007 IEEE International Test Conference - Backside E-Beam Probing on Nano scale devices
Schalangen, R., Leihkauf, R., Kerst, U., Boit, C.Year:
2007
Language:
english
DOI:
10.1109/test.2007.4437627
File:
PDF, 1.01 MB
english, 2007