![](/img/cover-not-exists.png)
[IEEE 2014 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY (2014.5.19-2014.5.21)] 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) - Correlation study of white light interferometer measurements with atomic force microscope measurements for post-CMP dishing measurements applied to TSV processing
Fisher, Daniel W., Timoney, Padraig, Yeong-Uk Ko,, Vaid, Alok, Thangaraju, Sarasvathi, Smith, Daniel, Sung Pyo Jung,, Alapati, Ramakanth, Wonwoo Kim,, Peak, Jonathan, Amin, Hemant, Johnson, TimYear:
2014
Language:
english
DOI:
10.1109/asmc.2014.6847019
File:
PDF, 322 KB
english, 2014