Point defects in ZrO/sub 2/ high-/spl kappa/ gate oxide

IEEE Transactions on Device and Materials Reliability 2005 / 03 Vol. 5; Iss. 1

Point defects in ZrO/sub 2/ high-/spl kappa/ gate oxide

Robertson, J., Ka Xiong,, Falabretti, B.
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Volume:
5
Language:
english
Journal:
IEEE Transactions on Device and Materials Reliability
DOI:
10.1109/tdmr.2005.845476
Date:
March, 2005
File:
PDF, 527 KB
english, 2005
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