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[American Vacuum Soc 2002 7th International Symposium on Plasma- and Process-Induced Damage - Maui, HI, USA (5-7 June 2002)] 7th International Symposium on Plasma- and Process-Induced Damage - Thermal conductivity and softening of gate oxide breakdown
Chin-Yuan Ko,, Liao, P.J., Shih, J.R., Wang, J.J., Peng, Y.K., Yue, J.Year:
2002
Language:
english
DOI:
10.1109/ppid.2002.1042609
File:
PDF, 175 KB
english, 2002