[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Optical control and tuning of thermal-piezoresistive self-sustained oscillators
Hall, Harris J., Wang, Luda, Bunch, J. Scott, Pourkamali, Siavash, Bright, Victor M.Year:
2014
Language:
english
DOI:
10.1109/memsys.2014.6765863
File:
PDF, 1.08 MB
english, 2014