[IEEE 2007 7th IEEE Conference on Nanotechnology...

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[IEEE 2007 7th IEEE Conference on Nanotechnology (IEEE-NANO) - Hong Kong, China (2007.08.2-2007.08.5)] 2007 7th IEEE Conference on Nanotechnology (IEEE NANO) - UV Enhanced low temperature wafer direct bonding and interface quality test

Xiaohui Lin,, Tielin Shi,, Guanglan Liao,, Zirong Tang,, Shiyuan Liu,, Lei Nie,
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Year:
2007
Language:
english
DOI:
10.1109/nano.2007.4601296
File:
PDF, 2.68 MB
english, 2007
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