Micromachined One-Port Aluminum Nitride Lamb Wave...

Journal of Microelectromechanical Systems 2014 / 02 Vol. 23; Iss. 1

Micromachined One-Port Aluminum Nitride Lamb Wave Resonators Utilizing the Lowest-Order Symmetric Mode

Lin, Chih-Ming, Yantchev, Ventsislav, Zou, Jie, Chen, Yung-Yu, Pisano, Albert P.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2013.2290793
Date:
February, 2014
File:
PDF, 5.24 MB
english, 2014
Conversion to is in progress
Conversion to is failed