Thermal de-isolation of silicon microstructures in a plasma etching environment
Lee, Yong-Seok, Jang, Yun-Ho, Kim, Yong-Kweon, Kim, Jung-MuVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/2/025026
Date:
February, 2013
File:
PDF, 1.67 MB
english, 2013