![](/img/cover-not-exists.png)
[IEEE TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - San Francisco, CA, USA (24-27 June 1991)] TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - Single element excitation and detection of (micro-)mechanical resonators
Tilmans, H.A.C., IJntema, D.J., Fluitman, J.H.J.Year:
1991
DOI:
10.1109/sensor.1991.148931
File:
PDF, 377 KB
1991