Confinement of Microplasmas in Silicon Channels With Widths...

IEEE Transactions on Plasma Science 2011 / 11 Vol. 39; Iss. 11

Confinement of Microplasmas in Silicon Channels With Widths as Small as $< \hbox{5}\ \mu\hbox{m}$

Kim, T. L., Kim, E. S., Park, S.-J., Eden, J. G.
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Volume:
39
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2011.2165562
Date:
November, 2011
File:
PDF, 266 KB
english, 2011
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