Glow Characterization in Low-Pressure Radio-Frequency...

IEEE Transactions on Plasma Science 2011 / 11 Vol. 39; Iss. 11

Glow Characterization in Low-Pressure Radio-Frequency $\hbox{CH}_{2} \hbox{F}_{2}$ and $\hbox{C}_{2}\hbox{H}_{2}\hbox{F}_{4}$ Plasma Deposition Systems

Huang, Chun, Lin, Cheng-I., Tsai, Ching-Yuan, Pan, Chien-Hsuan
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
39
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2011.2157528
Date:
November, 2011
File:
PDF, 198 KB
english, 2011
Conversion to is in progress
Conversion to is failed