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[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - High Temperature Ion Implantation: a Solution for n-Type Junctions in Strained Silicon
Heiermann, Wolfgang, Buca, Dan, Trinkaus, Helmut, Holländer, Bernd, Breuer, Uwe, Kernevez, Nelly, Ghyselen, Bruno, Mantl, SiegfriedYear:
2009
Language:
english
DOI:
10.1149/1.3118935
File:
PDF, 466 KB
english, 2009