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[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Novel concave-based micro optical components
Sheng-Yi Hsiao,, Chih-Chun Lee,, Weileun Fang,Year:
2008
Language:
english
DOI:
10.1109/memsys.2008.4443608
File:
PDF, 4.01 MB
english, 2008