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[IEEE 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Shanghai, China (2006.10.23-2006.10.26)] 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Advances in atomic level deposition technologies
Seidel, Tom, Dalton, Jeremie, Karim, Zia, Lindner, Johannes, Daulesberg, Martin, Zhang, WeiYear:
2006
Language:
english
DOI:
10.1109/icsict.2006.306294
File:
PDF, 143 KB
english, 2006