Fabrication of Pb(Zr,Ti)O 3 Thin Films by Liquid Delivery...

Integrated Ferroelectrics 2002 / 01 Vol. 46; Iss. 1

Fabrication of Pb(Zr,Ti)O 3 Thin Films by Liquid Delivery MOCVD Using a Cocktail Source with Pb(METHD) 2 , Zr(METHD) 4 and Ti(MPD)(METHD) 2

Otani, Yohei, Abe, Norikazu, Ueda, Yoshiki, Miyake, Masato, Okamura, Soichiro, Shiosaki, Tadashi
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Volume:
46
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580215398
Date:
January, 2002
File:
PDF, 455 KB
2002
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