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STRUCTURAL AND ELECTRICAL PROPERTIES OF INDIUM DOPED ZNO THIN FILM ON 6H-SIC SUBSTRATE BY RF MAGNETRON SPUTTERING
KIM, DONG Hun, CHO, NAM Gyu, KIM, HO-GI, LEE, WON-JAEVolume:
112
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584587.2009.484698
Date:
June, 2010
File:
PDF, 665 KB
english, 2010