[IEEE The 31st IEEE International Conference on Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts. - Baltimore, MD, USA (June 28-July 1, 2004)] The 31st IEEE International Conference on Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts. - Development of a new multi-plasma gas inductively coupled plasma torch
Okino, A., Miyahara, H., Yabuta, H., Mizusawa, Y., Takayuki Doi,, Watanabe, M., Hotta, E.Year:
2004
Language:
english
DOI:
10.1109/plasma.2004.1339986
File:
PDF, 56 KB
english, 2004