[IEEE 2010 10th IEEE International Conference on...

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[IEEE 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Shanghai, China (2010.11.1-2010.11.4)] 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology - Structural evolution of the incubation layer in microcrystalline silicon films deposited by Jet-ICPCVD

Zuo, Zewen, Wang, Yu, Xin, Yu, Lu, Jin, Wang, Junzhuan, Pu, Lin, Shi, Yi, Zheng, Youdou
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Year:
2010
Language:
english
DOI:
10.1109/icsict.2010.5667495
File:
PDF, 455 KB
english, 2010
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