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[IEEE 2007 Digest of papers Microprocesses and Nanotechnology - Kyoto, Japan (2007.11.5-2007.11.8)] 2007 Digest of papers Microprocesses and Nanotechnology - Deformation induced by residual stress during deposition process of lateral motion micro electrothermal actuators
Lin, Meng-Ju, Hwan, Chung-Li, Lo, Chih-Ching, Liao, Jung-NanYear:
2007
Language:
english
DOI:
10.1109/imnc.2007.4456252
File:
PDF, 1.36 MB
english, 2007