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[IEEE 2011 IEEE Photonics Conference (IPC) - Arlington, VA, USA (2011.10.9-2011.10.13)] IEEE Photonic Society 24th Annual Meeting - Scalable Talbot lithography with an extreme ultraviolet table top laser
Urbanski, L., Wachulak, P., Isoyan, A., Stein, A., Menoni, C.S., Rocca, J.J., Marconi, M.Year:
2011
Language:
english
DOI:
10.1109/pho.2011.6110819
File:
PDF, 257 KB
english, 2011