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[IEEE 2008 16th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Las Vegas, NV, USA (2008.09.30-2008.10.3)] 2008 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTA and FLA of ultra-shallow implanted layers in Ge
Wundisch, C., Posselt, M., Anwand, W., Schmidt, B., Mucklich, A., Skorupa, W., Clarysse, T., Simoen, E.Year:
2008
Language:
english
DOI:
10.1109/rtp.2008.4690562
File:
PDF, 2.06 MB
english, 2008