Identification of influence factors in a thermal model of a...

Inverse Problems in Science and Engineering 2007 / 07 Vol. 15; Iss. 5

Identification of influence factors in a thermal model of a plasma-assisted chemical vapor deposition process

Rouquette, Sébastien, Autrique, Laurent, Chaussavoine, Charles, Thomas, Laurent
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Volume:
15
Language:
english
Journal:
Inverse Problems in Science and Engineering
DOI:
10.1080/17415970600838764
Date:
July, 2007
File:
PDF, 2.30 MB
english, 2007
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