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[IEEE 2009 IEEE International Electron Devices Meeting (IEDM) - Baltimore, MD, USA (2009.12.7-2009.12.9)] 2009 IEEE International Electron Devices Meeting (IEDM) - Statistical enhancement of combined simulations of RDD and LER variability: What can simulation of a 105 sample teach us?
Reid, Dave, Millar, Campbell, Roy, Gareth, Roy, Scott, Asenov, AsenYear:
2009
Language:
english
DOI:
10.1109/iedm.2009.5424241
File:
PDF, 1.00 MB
english, 2009