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[IEEE 2010 IEEE International Symposium on Circuits and Systems - ISCAS 2010 - Paris, France (2010.05.30-2010.06.2)] Proceedings of 2010 IEEE International Symposium on Circuits and Systems - A MEMS-based temperature-compensated vacuum sensor for low-power monolithic integration
Taghvaei, M. A., Cicek, P.-V., Allidina, K., Nabki, F., El-Gamal, M. N.Year:
2010
Language:
english
DOI:
10.1109/iscas.2010.5537914
File:
PDF, 556 KB
english, 2010