Parameter optimization of sub-35 nm contact-hole...

Parameter optimization of sub-35 nm contact-hole fabrication using particle swarm optimization approach

Te-Sheng Li, Chih-Ming Hsu
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Volume:
37
Year:
2010
Language:
english
Pages:
8
DOI:
10.1016/j.eswa.2009.05.077
File:
PDF, 352 KB
english, 2010
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