[IEEE 2011 4th International Conference on Ubi-Media Computing (U-Media) - Sao Paulo, Brazil (2011.07.3-2011.07.4)] 2011 Fourth International Conference on Ubi-Media Computing - The Module Design for Critical Dimension Bias Correction of Slanted Line on High Level Large Area Mask
Kao, Wen-Hsing, Chang, Yong-Chuan, Lin, Chi-ChingYear:
2011
Language:
english
DOI:
10.1109/u-media.2011.65
File:
PDF, 488 KB
english, 2011