Spline regression based feature extraction for...

Expert Systems with Applications 2011 Vol. 38; Iss. 5

Spline regression based feature extraction for semiconductor process fault detection using support vector machine

Jonghyuck Park, Ick-Hyun Kwon, Sung-Shick Kim, Jun-Geol Baek
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Volume:
38
Year:
2011
Language:
english
Pages:
8
DOI:
10.1016/j.eswa.2010.10.062
File:
PDF, 655 KB
english, 2011
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