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[IEEE Nanophotonics - Istanbul, Turkey (2011.08.8-2011.08.11)] 16th International Conference on Optical MEMS and Nanophotonics - Smoothing sidewalls of a MEMS-based silicon X-ray optics
Moriyama, Teppei, Ezoe, Yuichiro, Ogawa, Tomohiro, Ohashi, Takaya, Mitsuishi, Ikuyuki, Mita, Makoto, Mitsuda, Kazuhisa, Kanamori, Yoshiaki, Maeda, AkioYear:
2011
Language:
english
DOI:
10.1109/omems.2011.6031043
File:
PDF, 755 KB
english, 2011