STRUCTURES AND PROPERTIES OF PZT(52/48) THIN FILMS WITH...

Integrated Ferroelectrics 2010 / 06 Vol. 113; Iss. 1

STRUCTURES AND PROPERTIES OF PZT(52/48) THIN FILMS WITH DIFFERENT SUBSTRATE TEMPERATURE AND OXYGEN PERCENTAGE IN MIXED Ar AND O 2 GAS ON LNO/Si (100) BY SPUTTERING

ZHANG, X. D., LIN, T., MENG, X. J., SUN, J. L., CHU, J. H., PARK, SUNGMIN, KWON, HYOSANG, HWANG, JIHWAN, PARK, GWANGSEO
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Volume:
113
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584587.2009.490195
Date:
June, 2010
File:
PDF, 1.30 MB
english, 2010
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