Lift-off of large-scale ultrathin nanomembranes

Journal of Micromechanics and Microengineering 2015 / 01 Vol. 25; Iss. 1

Lift-off of large-scale ultrathin nanomembranes

Miller, Joshua J, Carter, Robert N, McNabb, Kelly B, DesOrmeaux, Jon-Paul S, Striemer, Christopher C, Winans, Joshua D, Gaborski, Thomas R
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Volume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/1/015011
Date:
January, 2015
File:
PDF, 1.39 MB
english, 2015
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