On the processing aspects of high performance hybrid...

On the processing aspects of high performance hybrid backside illuminated CMOS imagers

De Vos, Joeri, De Munck, Koen, Minoglou, Kiki, Rao, Padmakumar Ramachandra, Erismis, Mehmet Akif, De Moor, Piet, Tezcan, Deniz Sabuncuoglu
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Volume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/7/074006
Date:
July, 2011
File:
PDF, 1.84 MB
english, 2011
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