[IEEE 2011 IEEE 11th International Conference on...

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[IEEE 2011 IEEE 11th International Conference on Nanotechnology (IEEE-NANO) - Portland, OR, USA (2011.08.15-2011.08.18)] 2011 11th IEEE International Conference on Nanotechnology - Recycling Si wafers to fabricate multiple Si nanohole thin films by metal-assisted etching

Shiu, Shu-Chia, Lin, Tzu-Ching, Pun, Keng-Lam, Syu, Hong-Jhang, Hung, Shih-Che, Chao, Jiun-Jie, Lin, Ching-Fuh
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Year:
2011
Language:
english
DOI:
10.1109/nano.2011.6144571
File:
PDF, 476 KB
english, 2011
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