Nanoimprint Mold for 2.5 Tbit/in.$^{2}$ Directed...

Japanese Journal of Applied Physics 2012 / 3 Vol. 51

Nanoimprint Mold for 2.5 Tbit/in.$^{2}$ Directed Self-Assembly Bit Patterned Media with Phase Servo Pattern

Yamamoto, Ryousuke, Yuzawa, Akiko, Shimada, Takuya, Ootera, Yasuaki, Kamata, Yoshiyuki, Kihara, Naoko, Kikitsu, Akira
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Volume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.046503
Date:
March, 2012
File:
PDF, 1.45 MB
english, 2012
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