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Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures
Ctvrtlik, Radim, Al-Haik, Marwan S., Kulikovsky, ValeriyVolume:
50
Language:
english
Journal:
Journal of Materials Science
DOI:
10.1007/s10853-014-8715-0
Date:
February, 2015
File:
PDF, 1.22 MB
english, 2015