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[IEEE 2008 IEEE Sensors - Lecce, Italy (2008.10.26-2008.10.29)] 2008 IEEE Sensors - Sensitivity tunable capacitive type micro accelerometer
Je, Chang Han, Lee, Sungsik, Lee, Myung Lae, Jung, Sunghae, Lee, Ahra, Hwang, Gunn, Byoung Gon Yu,, Chang Auck Choi,Year:
2008
Language:
english
DOI:
10.1109/icsens.2008.4716616
File:
PDF, 1.10 MB
english, 2008