Planarized, Extendible, Multilayer Fabrication Process for Superconducting Electronics
Yohannes, Daniel T., Hunt, Rick T., Vivalda, John A., Amparo, Denis, Cohen, Alexander, Vernik, Igor V., Kirichenko, Alex F.Volume:
25
Language:
english
Journal:
IEEE Transactions on Applied Superconductivity
DOI:
10.1109/TASC.2014.2365562
Date:
June, 2015
File:
PDF, 960 KB
english, 2015