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[IEEE 2014 IEEE International Ultrasonics Symposium (IUS) - Chicago, IL, USA (2014.9.3-2014.9.6)] 2014 IEEE International Ultrasonics Symposium - Ultrasonic beam formation by pMUTs array using epitaxial PZT thin films on γ-Al2O3/Si substrates
Akai, Daisuke, Ishida, Makoto, Nishimura, Masato, Okada, NagayaYear:
2014
Language:
english
DOI:
10.1109/ultsym.2014.0643
File:
PDF, 1.65 MB
english, 2014