From nuclear physics to semiconductor manufacturing: the...

From nuclear physics to semiconductor manufacturing: the making of ion implantation

Lécuyer, Christophe, Brock, David C.
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Volume:
25
Language:
english
Journal:
History and Technology
DOI:
10.1080/07341510903083211
Date:
September, 2009
File:
PDF, 137 KB
english, 2009
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