Deposition of thin BST films in a multi-wafer planetary...

Integrated Ferroelectrics 2000 / 10 Vol. 30; Iss. 1-4

Deposition of thin BST films in a multi-wafer planetary reactor

Ehrhart, P., Fitsilis, F., Regnery, S., Waser, R., Schienle, F., Schumacher, M., Daulsberg, M., Strzyzewski, P., Juergensen, H.
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Volume:
30
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580008222267
Date:
October, 2000
File:
PDF, 687 KB
english, 2000
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