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[IEEE The Pacific Rim Conference on Lasers and Electro-Optics (CLEO/PACIFIC RIM) - Shanghai, China (2009.08.30-2009.08.3)] 2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics - Removal of nano particles on silicon wafer by self-channeled plasma filament
Cho, Sung-Hak, Park, Jung-Kyu, Chang, Won-Seok, Kim, Jae-Goo, Whang, Kyung-HyunYear:
2009
Language:
english
DOI:
10.1109/cleopr.2009.5292259
File:
PDF, 195 KB
english, 2009