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[IEEE 9th International Vacuum Microelectronics Conference - St. Petersburg, Russia (7-12 July 1996)] 9th International Vacuum Microelectronics Conference - A new fabrication method of silicon field emitter array with local oxidation of polysilicon and chemical-mechanical-polishing
Jin Ho Lee,, Sung Weon Kang,, Sang Gi Kim,, Yoon-Ho Song,, Kyoung Ik Cho,, Hyung Joun Yoo,Year:
1996
Language:
english
DOI:
10.1109/ivmc.1996.601854
File:
PDF, 467 KB
english, 1996